Theoretically predicted and experimentally determined effects of the Si/(Si+C) gas phase ratio on the growth and character of monocrystalline beta silicon carbide films-Reference-Cited by-同舟云学术

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Theoretically predicted and experimentally determined effects of the Si/(Si+C) gas phase ratio on the growth and character of monocrystalline beta silicon carbide films

Published:1986-10-15 Issue:8 Volume:60 Page:2897-2903
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Kim H. J.,Davis R. F.

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.337075

Reference20 articles.

1. Thermal conductivity and electrical properties of 6Hsilicon carbide

2. Breakdown field in vapor‐grown silicon carbidep‐njunctions

3. Saturated electron drift velocity in 6H silicon carbide

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