Raman scattering studies of chemical‐vapor‐deposited cubic SiC films of (100) Si
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.341533
Reference31 articles.
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2. Production of large‐area single‐crystal wafers of cubic SiC for semiconductor devices
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4. High‐temperature electrical properties of 3C‐SiC epitaxial layers grown by chemical vapor deposition
5. Epitaxial Growth and Characterization of β ‐ SiC Thin Films
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