1. State Key Laboratory of Materials for Integrated Circuits, Shenzhen Institute of Advanced Electronic Materials, Shenzhen Institute of Advanced Technology, Chinese Academy of Sciences 1 , Shenzhen 518055, China
2. Department of Electronics Engineering, The Chinese University of Hong Kong 2 , Shatin, N.T., Hong Kong 999077, China
3. School of Materials Science and Engineering 3 , Georgia Institute of Technology, Atlanta, GA 30332, USA