A parylene coating system specifically designed for producing ultra-thin films for nanoscale device applications
Author:
Affiliation:
1. School of Physics, University of New South Wales, Sydney, NSW 2052, Australia
Funder
University of New South Wales
Australian Research Council
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.5099293
Reference37 articles.
1. R. Ghodssi and P. Lin, MEMS Materials and Processes Handbook (Springer, New York, 2011), pp. 223–227.
2. Field-effect transistors on rubrene single crystals with parylene gate insulator
3. Influence of the gate dielectric on the mobility of rubrene single-crystal field-effect transistors
4. Ultraflexible and ultrathin polymeric gate insulator for 2 V organic transistor circuits
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