On the mechanical strength of free‐standing and substrate‐bonded Al thin films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.358546
Reference24 articles.
1. Mechanical properties of thin films
2. Relaxation of Thermal Stresses in Al-Films
3. The temperature dependence of stresses in aluminum films on oxidized silicon substrates
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