Diffusion of arsenic in polycrystalline silicon
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.93263
Reference11 articles.
1. Diffusion of Impurities in Polycrystalline Silicon
2. Arsenic implantation into polycrystalline silicon and diffusion to silicon substrate
3. Arsenic-implanted polysilicon layers
4. Structure and Stability of Low Pressure Chemically Vapor‐Deposited Silicon Films
5. Dopant segregation in polycrystalline silicon
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