Transducer design for AlN Lamb wave resonators
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4979914
Reference32 articles.
1. Thin film Lamb wave resonators in frequency control and sensing applications: a review
2. Temperature-compensated aluminum nitride lamb wave resonators
3. Electrode design of AlN Lamb wave resonators
4. Piezoelectric Aluminum Nitride Vibrating Contour-Mode MEMS Resonators
5. High-Q aluminum nitride Lamb wave resonators with biconvex edges
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