Mo0.5Si0.5/Si multilayer soft x‐ray mirrors, high thermal stability, and normal incidence reflectivity
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.110529
Reference18 articles.
1. Design And Modeling Considerations For SSRL Beam Line Wunder
2. Enhancement of the reflectivity of Mo/Si multilayer x‐ray mirrors by thermal treatment
3. Comparison Among Multilayer Soft X-Ray Mirrors Fabricated By Electron Beam, Dc-, Rf-Magnetron Sputtering And Ion Beam Sputtering Deposition
4. Suppression of columnar-structure formation in Mo-Si layered synthetic microstructures
5. Measurement of soft x‐ray multilayer mirror reflectance at normal incidence using laser‐produced plasmas
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1. Advanced nanometer-size structures;Acta Physica Slovaca. Reviews and Tutorials;2007-12-01
2. Heat stability of Mo/Si multilayers inserted with compound layers;Surface and Coatings Technology;2003-06
3. Optimization of the silicon oxide layer thicknesses inserted in the Mo/Si multilayer interfaces for high heat stability and high reflectivity;Journal of Applied Physics;2002-11
4. Soft X-ray optical multilayer mirrors;Chinese Science Bulletin;1999-06
5. Structural stability of heat-treated CoN/CN soft X-ray multilayers fabricated by dual-facing-target sputtering;Applied Physics A: Materials Science & Processing;1998-04-01
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