Subject
General Physics and Astronomy
Cited by
9 articles.
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1. Elimination of stacking faults in a silicon epitaxial layer of (100) orientation by heat treatment;Journal of Applied Physics;1990-06
2. References;Thin Films by Chemical Vapour Deposition;1990
3. Chemical Etching;Thin Film Processes;1978
4. Elimination of Stacking Fault in Si Epitaxial Layer by Heat Treatment;Japanese Journal of Applied Physics;1972-05
5. Lithium Precipitation in Silicon;Proceedings, annual meeting, Electron Microscopy Society of America;1971-08