Carrier mobility of highly transparent conductive Al-doped ZnO polycrystalline films deposited by radio-frequency, direct-current, and radio-frequency-superimposed direct-current magnetron sputtering: Grain boundary effect and scattering in the grain bulk-Reference-Cited by-同舟云学术

Carrier mobility of highly transparent conductive Al-doped ZnO polycrystalline films deposited by radio-frequency, direct-current, and radio-frequency-superimposed direct-current magnetron sputtering: Grain boundary effect and scattering in the grain bulk

Published:2015-01-28 Issue:4 Volume:117 Page:045304
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Nomoto Junichi¹,Makino Hisao¹^ORCID,Yamamoto Tetsuya¹

Affiliation:

1. Research Institute, Kochi University of Technology, 185 Miyanokuchi, Tosayamada-cho, Kami-shi, Kochi 782-8502, Japan

Funder

JSPS KAKENHI

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4906353

Reference43 articles.

1. New n-Type Transparent Conducting Oxides

2. K. Kushiya , S. Kuriyama , I. Hara , Y. Nagoya , M. Tachiyuki , and Y. Fujiwara , in Proceedings of 29th IEEE Photovoltaic Specialists Conference ( Institute of Electrical and Electronics Engineers, New Orleans, LA, 2002), p. 579.

3. Ga-doped zinc oxide: An attractive potential substitute for ITO, large-area coating, and control of electrical and optical properties on glass and polymer substrates

4. Development of Ga-doped ZnO transparent electrodes for liquid crystal display panels

5. High rate planar magnetron deposition of transparent, conducting, and heat reflecting films on glass and plastic

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