Modular interface and experimental setup for in-vacuum operation of microfluidic devices
Author:
Affiliation:
1. Advanced NEMS Laboratory, Institute of Mechanical Engineering, École Polytechnique Fédérale de Lausanne (EPFL), 1015 Lausanne, Switzerland
Funder
MCSA
Swiss National Science Foundation
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.5088946
Reference16 articles.
1. Optical MEMS for telecoms
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