Periodical nanostructure fabrication using electron interference fringes produced by scanning interference electron microscope
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.113698
Reference10 articles.
Cited by 16 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
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3. Laser interference patterning methods: Possibilities for high-throughput fabrication of periodic surface patterns;Advanced Optical Technologies;2017-01-01
4. Three-dimensional micro/nanoscale architectures: fabrication and applications;Nanoscale;2015
5. Nanopatterning by Laser Interference Lithography: Applications to Optical Devices;Journal of Nanoscience and Nanotechnology;2014-02-01
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