Ion energy distributions in inductively coupled radio-frequency discharges in argon, nitrogen, oxygen, chlorine, and their mixtures
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.370138
Reference21 articles.
1. Studies of Ion Kinetic-Energy Distributions in the Gaseous Electronics Conference Rf Reference Cell
2. Ion bombardment energy distributions in a radio frequency induction plasma
3. Ion energy distribution functions in a planar inductively coupled RF discharge
4. On the radial distribution and nonambipolarity of charged particle fluxes in a nonmagnetized planar inductively coupled plasma
5. Ion energy and angular distributions in inductively coupled radio frequency discharges in argon
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