Fast room‐temperature growth of SiO2films by molecular‐layer dosing
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.104804
Reference8 articles.
1. The nature of titanium-containing films formed on polymer surfaces by reactions of sorbed water with TiCl4
2. Selective Deposition of Silicon Oxide Using a Plasma-Fluorinated Resist Mask
3. Digital chemical vapor deposition of SiO2
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