Thermal reactive ion etching technique involving use of self-heated cathode
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4917193
Reference12 articles.
1. High-aspect-ratio bulk micromachining of titanium
2. Inductively Coupled Plasma Etching of Bulk Titanium for MEMS Applications
3. Deep reactive ion etching of Pyrex glass using SF6 plasma
4. Reactive Ion Etching of Lead Zirconate Titanate (PZT) Thin Film Capacitors
5. Dry-Etching Mechanism of SputteredPb(Zr1-xTix)O3Film
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