Low-stress indium–tin–oxide thin films rf magnetron sputtered on polyester substrates
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1504874
Reference18 articles.
1. Tin doped indium oxide thin films: Electrical properties
2. Evaporated Sn‐doped In2O3films: Basic optical properties and applications to energy‐efficient windows
3. Preparation and physical properties of transparent conducting oxide films
4. Strain-dependent electrical resistance of tin-doped indium oxide on polymer substrates
5. Effect of film density on electrical properties of indium tin oxide films deposited by dc magnetron reactive sputtering
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