Plasma chemistry aspects of a-Si:H deposition using an expanding thermal plasma
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.368977
Reference80 articles.
1. Triple-junction amorphous silicon alloy solar cell with 14.6% initial and 13.0% stable conversion efficiencies
2. Characterization of plasma beam deposited amorphous hydrogenated silicon
3. Deposition of a-Si:H and a-C:H using an expanding thermal arc plasma
4. An Expanding Thermal Plasma for Deposition of a-Si:H
5. On the Effect of Substrate Temperature on a-Si:H Deposition Using an Expanding Thermal Plasma
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