Effects of argon gas pressure on its metastable-state density in high-density plasmas
Author:
Affiliation:
1. Center for Vacuum Technology, Korea Research Institute of Standards and Science, Daejeon 305-306, South Korea
2. Department of Physics, Chungnam National University, Daejeon 305-764, South Korea
Funder
Korea Research Council of Fundamental Science and Technology (KRCF)
Korea Research Institute of Standards and Science (KRISS)
Ministry of Science, ICT and Future Planning (MSIP)
Publisher
AIP Publishing
Subject
Condensed Matter Physics
Reference25 articles.
1. M. Lieberman and A. Lichenberg , Principles of Plasma Discharges and Materials Processing, 2nd ed. ( Wiley, New York, 2005).
2. Electron Energy Distributions in Stationary Discharges
3. L. D. Tsendin , Zh. Eksp. Teor. Fiz. 66, 805 (1974).
4. Experimental evidence on the nonlocality of the electron distribution function
5. Paradoxical spatial distribution of the electron temperature in a low pressure rf discharge
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