Sequential clustering reactions of Si+ with SiD4: Identification of a bottleneck preventing rapid growth of hydrogenated silicon particles
Author:
Publisher
AIP Publishing
Subject
Physical and Theoretical Chemistry,General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.454737
Reference34 articles.
1. Observation of Si2in a chemical vapor deposition reactor by laser excited fluorescence
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5. Gas‐phase silicon atoms in silane chemical vapor deposition: Laser‐excited fluorescence measurements and comparisons with model predictions
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