Tailoring the Ti∕4H–SiC Schottky barrier by ion irradiation
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1841476
Reference19 articles.
1. Nitrogen and aluminum implantation in high resistivity silicon carbide
2. Low-dose n-type nitrogen implants in 4H-SiC
3. Effect of ion implantation parameters on Al dopant redistribution in SiC after annealing: Defect recovery and electrical properties of p-type layers
4. Low temperature annealing of 4H–SiC Schottky diode edge terminations formed by 30 keV Ar+ implantation
5. Nitrogen deactivation by implantation-induced defects in 4H–SiC epitaxial layers
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1. Effect of Strain on Atomic-Scale Friction in Two-Dimensional Graphene/ZrS2 van der Waals Heterostructure;Tribology Letters;2023-09-26
2. Effects of electric polarization and defect energy levels induced by ion irradiation on the electrical behavior of 4H-SiC Schottky barrier diodes;Journal of Physics D: Applied Physics;2023-06-02
3. A first-principles study on the superlubricity of two-dimensional graphene/ZrS2 heterostructure;Tribology International;2022-10
4. Ni/Heavily-Doped 4H-SiC Schottky Contacts;Materials Science Forum;2022-05-31
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