Current-induced local oxidation of metal films: Mechanism and quantum-size effects
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.122413
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1. Device Fabrication by Scanned Probe Oxidation
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3. Atomic force microscope tip-induced local oxidation of silicon: kinetics, mechanism, and nanofabrication
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