High-frequency properties of SrTiO3 thin-film capacitors fabricated on polymer-coated alloy substrates-Reference-Cited by-同舟云学术

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High-frequency properties of SrTiO3 thin-film capacitors fabricated on polymer-coated alloy substrates

Published:1998-01-12 Issue:2 Volume:72 Page:261-263
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Sugii Nobuyuki,Yamada Hiroji,Kagaya Osamu,Yamasaki Matsuo,Sekine Kenji,Yamashita Kiichi,Watanabe Mitsuhiro,Murakami Shirou

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

http://aip.scitation.org/doi/pdf/10.1063/1.120704

Reference2 articles.

1. Study of tantalum oxide thin film capacitors on metallized polymer sheets for advanced packaging applications

2. Substrate Potential Effects on Low-Temperature Preparation of SrTiO3Thin Films by RF Magnetron Sputtering

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