Towards the development of a hybrid-integrated chip interferometer for online surface profile measurements
Author:
Affiliation:
1. EPSRC Centre for Innovative Manufacturing in Advanced Metrology, University of Huddersfield, Huddersfield HD1 3DH, United Kingdom
Funder
Engineering and Physical Sciences Research Council (EPSRC)
European Research Council (ERC)
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4952952
Reference44 articles.
1. Precision surface measurement
2. Handbook of Surface and Nanometrology
3. Optical Metrology of Surfaces
4. Comparison of surface roughness measurements by stylus profiler, AFM and non-contact optical profiler
5. Optical techniques for on-line measurement of surface topography
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