High-resolution x-ray diffraction and high-resolution scanning electron microscopy studies of Si-based structures with a buried amorphous layer
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.368919
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1. Synthesis of silicon dioxide by ion implantation
2. New trends in SIMOX
3. SIMOX material manufacturability
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5. Threading dislocations in silicon layer produced by separation by implanted oxygen process
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