1. Fukushima Renewable Energy Institute, National Institute of Advanced Industrial Science and Technology (AIST), 2-2-9 Machiikedai, Koriyama, Fukushima 963-0298, Japan
2. SCREEN Holdings Co. Ltd., 322 Furukawa-cho, Hazukashi, Fushimi-ku, Kyoto 612-8486, Japan
3. Graduate School of Engineering, Division of Electrical, Electronic and Information Engineering, Osaka University, Institute of Laser Engineering, 2-6 Yamadaoka, Suita, Osaka 565-0871, Japan