Free standing and solidly mounted Lamb wave resonators based on Al0.85Sc0.15N thin film-Reference-Cited by-同舟云学术

Free standing and solidly mounted Lamb wave resonators based on Al0.85Sc0.15N thin film

Published:2019-06-03 Issue:22 Volume:114 Page:223103
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Parsapour Fazel¹,Pashchenko Vladimir¹,Chambon Hugo²,Nicolay Pascal²,Bleyl Ingo³,Roesler Ulrike³,Muralt Paul¹^ORCID

Affiliation:

1. Electroceramic Thin Films Group, Ecole Polytechnique Fédérale de Lausanne (EPFL), Station 12, 1015 Lausanne, Switzerland

2. Carinthian Tech Research AG, High Tech Campus, Europa Strasse 12, 9524 Villach, Austria

3. RF360 Europe GmbH, Anzinger Strasse 13, 81617 Munich, Germany

Funder

Bundesbehörden der Schweizerischen Eidgenossenschaft

Austrian Science Fund

Hasler Stiftung

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

http://aip.scitation.org/doi/pdf/10.1063/1.5088892

Reference30 articles.

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5. C.M. Lin , V. Yantchev , Y.Y. Chen , V. V. Felmetsger , and A. P. Pisano , in 2011 Joint Conference of the IEEE International Frequency Control Symposium and European Frequency and Time Forum, FCS (IEEE, 2011), pp. 1–5.

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