Temperature and humidity sensor based on MEMS technology-Reference-Cited by-同舟云学术

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Temperature and humidity sensor based on MEMS technology

Published:2021-08-01 Issue:8 Volume:11 Page:085126
ISSN:2158-3226
Container-title:AIP Advances
language:en
Short-container-title:AIP Advances

Author:

Zhao Dongyan¹,Wang Yubo¹,Shao Jin¹,Zhang Peng¹,Chen Yanning¹²,Fu Zhen¹²,Wang Shuaipeng¹²,Zhao Wenlong¹,Zhou Zhimei¹³,Yuan Yuandong¹²,Fu Dengyuan⁴,Zhu Yinfang⁴^ORCID

Affiliation:

1. National and Local Joint Engineering Research Center for Reliability Technology of Energy Internet Intelligent Terminal Core Chip, Beijing Smart-Chip Microelectronics Technology Co., Ltd., Beijing 100192, China

2. Beijing Chip Identification Technology Co., Ltd., Beijing 102200, China

3. Smart Shine Microelectronics Technology Co., Ltd., Qingdao 266300, China

4. Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China

Funder

National Natural Science Foundation of China

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

https://aip.scitation.org/doi/pdf/10.1063/5.0053342

Reference27 articles.

1. Humidity Sensors: A Review of Materials and Mechanisms

2. A Capacitive Fringing Field Sensor Design for Moisture Measurement Based on Printed Circuit Board Technology

3. Fast response humidity sensors for a medical microsystem

4. Fiber-optic temperature sensor based on interference of selective higher-order modes

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4. The combined effects of temperature and relative humidity on resonant frequency and quality factor of MEMS beam resonators in atmospheric pressure and gas rarefaction;Microsystem Technologies;2023-07-31

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