Electron density measurement using a partially covered hairpin resonator in an inductively coupled plasma-Reference-Cited by-同舟云学术

Electron density measurement using a partially covered hairpin resonator in an inductively coupled plasma

Published:2020-11-01 Issue:11 Volume:91 Page:113502
ISSN:0034-6748
Container-title:Review of Scientific Instruments
language:en
Short-container-title:Review of Scientific Instruments

Author:

Fan Xingchen¹,Wug Yhoshua²,Han Jia²^ORCID,Pribyl Patrick²,Carter Troy²^ORCID

Affiliation:

1. Department of Physics, Cornell University, Ithaca, New York 14850, USA

2. Department of Physics and Astronomy, University of California, Los Angeles, California 90095, USA

Funder

U.S. Department of Energy

Division of Physics

Publisher

AIP Publishing

Subject

Instrumentation

Link

http://aip.scitation.org/doi/am-pdf/10.1063/5.0025481

Reference23 articles.

1. Microwave resonator probe for localized density measurements in weakly magnetized plasmas

2. J. D. Miller, R. F. Schneider, K. T. Nguyen, G. Joyce, D. J. Weidman, J. Goldhar, and H. S. Uhm, in Conference Record of the 1991 IEEE Particle Accelerator Conference (IEEE, 1991), Vol. 1, pp. 239–241.

3. Temporal measurement of plasma density variations above a semiconductor bridge (SCB)

4. The hairpin resonator: A plasma density measuring technique revisited

5. Hairpin resonator probe measurements in RF plasmas

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. E–H transitions in Ar/O2 and Ar/Cl2 inductively coupled plasmas: Antenna geometry and operating conditions;Journal of Applied Physics;2023-05-01

2. Plasma density determination from ion current to cylindrical Langmuir probe with validation on hairpin probe measurements;Plasma Sources Science and Technology;2023-04-01