Hydrogen diffusion and the catalysis of enhanced oxygen diffusion in silicon at temperatures below 500 °C
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.349338
Reference37 articles.
1. Hydrogen in crystalline semiconductors
2. Enhanced thermal donor formation and oxygen diffusion in silicon exposed to a hydrogen plasma
3. On the permeation of hydrogen and helium in single crystal silicon and germanium at elevated temperatures
4. First-principles calculations of diffusion coefficients: Hydrogen in silicon
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