Aluminum oxide thin films prepared by chemical vapor deposition from aluminum 2‐ethylhexanoate
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.105016
Reference2 articles.
1. Deposition and Properties of Aluminum Oxide Obtained by Pyrolytic Decomposition of an Aluminum Alkoxide
2. Preparation and optical characterization of pyrolytically deposited thin films of some metal oxides
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