A note on solid‐state reaction kinetics: The formation of silicides from thin films of metallic alloys
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.334332
Reference22 articles.
1. Formation of thin films of NiSi: Metastable structure, diffusion mechanisms in intermetallic compounds
2. Contact reaction between Si and Pd‐W alloy films
3. Brillouin‐scattering studies of polycrystalline and amorphous sputtered films of Fe1−xBxand Co1−xBx
4. Shallow silicide contact
5. Phase separation in alloy‐Si interaction
Cited by 7 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Reactive diffusion in a prototype system: nickel - aluminum II: The ordered Cu3Au rule and the sequence of phase formation, nucleation;Thin Solid Films;1992-07
2. Competitive Reactions in Unicomponent/Bicomponent Contact Systems;MRS Proceedings;1992
3. Interactions between binary metallic alloys and Si, GeSi and GaAs;Materials Science Reports;1992-01
4. Cobalt Silicide Interconnection from a Si/W/Co Trilayer Structure;Journal of The Electrochemical Society;1989-01-01
5. Kinetics of formation of silicides: A review;Journal of Materials Research;1986-02
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