Simultaneous determination of the residual stress, elastic modulus, density and thickness of ultrathin film utilizing vibrating doubly clamped micro-/nanobeams-Reference-Cited by-同舟云学术

Simultaneous determination of the residual stress, elastic modulus, density and thickness of ultrathin film utilizing vibrating doubly clamped micro-/nanobeams

Published:2016-04 Issue:4 Volume:6 Page:045005
ISSN:2158-3226
Container-title:AIP Advances
language:en
Short-container-title:AIP Advances

Author:

Stachiv Ivo¹²,Kuo Chih-Yun³,Fang Te-Hua¹,Mortet Vincent²^ORCID

Affiliation:

1. Department of Mechanical Engineering, National Kaohsiung University of Applied Sciences, Kaohsiung, Taiwan

2. Institute of Physics, Czech Academy of Sciences, Prague, Czech Republic

3. Tzu-Chi University, Hualian City, Hualian, Taiwan

Funder

Ministry of Science and Technology, Taiwan (MOST)

Grantová Agentura České Republiky (GACR)

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4947031

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