Nucleation-enhancing treatment for diamond growth over a large-area using magnetoactive microwave plasma chemical vapor deposition
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1287411
Reference20 articles.
1. Vapor Deposition of Diamond Particles from Methane
2. Diamond synthesis from gas phase in microwave plasma
3. Low temperature diamond film fabrication using magneto-active plasma CVD
4. Focused ion-beam crater arrays for induced nucleation of diamond film
5. Low Temperature Fabrication of Diamond Films with Nanocrystal Seeding
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1. Nucleation growth mechanism of diamond on 4H-SiC substrate by microwave plasma chemical vapor deposition;Materials Today Communications;2022-06
2. Growth of Highly (110) Oriented Diamond Film by Microwave Plasma Chemical Vapor Deposition;Solid State Phenomena;2018-08
3. A review of nucleation, growth and low temperature synthesis of diamond thin films;International Materials Reviews;2007-01
4. Improvement in the crystalline quality of homoepitaxial diamond films by oxygen plasma etching of mirror-polished diamond substrates;Journal of Crystal Growth;2005-11
5. Diamond Nucleation Enhancement on Si by Controlling Ion-Bombardment Energy in Electron Cyclotron Resonance Plasma;Japanese Journal of Applied Physics;2002-09-15
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