Photon effect on radiative properties of silicon during rapid thermal processing
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.365780
Reference12 articles.
1. Spectral Emissivity of Silicon
2. Observation of silicon wafer emissivity in rapid thermal processing chambers for pyrometric temperature monitoring
3. Influence of temperature and backside roughness on the emissivity of Si wafers during rapid thermal processing
4. Emissivity of silicon at elevated temperatures
5. Emissivity Issues In Pyrometric Temperature Monitoring For RTP Systems
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