Oxidation of crystalline Si in an O2 plasma: Growth kinetics and oxide characterization
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.365235
Reference16 articles.
1. Silicon Oxidation in an Oxygen Plasma Excited by Microwaves
2. Silicon Oxide Films Grown in a Microwave Discharge
3. Selective anodic oxidation of silicon in oxygen plasma
4. Effects of dc bias on the kinetics and electrical properties of silicon dioxide grown in an electron cyclotron resonance plasma
5. A kinetics study of the electron cyclotron resonance plasma oxidation of silicon
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