Modeling of and experiments on dust particle levitation in the sheath of a radio frequency plasma reactor
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1852696
Reference27 articles.
1. Rastered laser light scattering studies during plasma processing: Particle contamination trapping phenomena
2. Derivation and experimental verification of a particulate transport model for a glow discharge
3. Instabilities in a dusty plasma with ion drag and ionization
4. Evolution of a Dust Void in a Radio-Frequency Plasma Sheath
5. Characterization of fine particle trapping in a plasma-enhanced chemical vapor deposition reactor
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