Detection of electron energy distribution function anisotropy in a magnetized electron cyclotron resonance plasma by using a directional Langmuir probe
Author:
Affiliation:
1. Department of Mechanical Engineering and Science, Graduate School of Engineering, Kyoto University, Kyoto 615-8540, Japan
2. Faculty of Engineering, Undergraduate School of Engineering Science, Kyoto University, Kyoto 615-8540, Japan
Funder
Japan Society for the Promotion of Science (JSPS)
Publisher
AIP Publishing
Subject
Condensed Matter Physics
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4890350
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1. Pulsed ECR ion source using the afterglow mode (invited)
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