Effect of the electron energy distribution on total energy loss with argon in inductively coupled plasmas-Reference-Cited by-同舟云学术

Effect of the electron energy distribution on total energy loss with argon in inductively coupled plasmas

Published:2015-01 Issue:1 Volume:22 Page:013501
ISSN:1070-664X
Container-title:Physics of Plasmas
language:en
Short-container-title:Physics of Plasmas

Author:

Kim June Young^ORCID,Kim Young-Cheol,Kim Yu-Sin^ORCID,Chung Chin-Wook

Publisher

AIP Publishing

Subject

Condensed Matter Physics

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4905515

Reference24 articles.

1. M. A. Lieberman and R. A. Gottscho , in Physics of Thin Films, edited by M. Francombe and J. Vossen ( Academic, New York, 1994), Vol. 18, pp. 1–119.

2. Global model of Ar, O2, Cl2, and Ar/O2 high‐density plasma discharges

3. Experimental studies of O2/Ar plasma in a planar inductive discharge

4. Oxygen discharges diluted with argon: dissociation processes

5. Global model of plasma chemistry in a low-pressure O2/F2discharge

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