Comparison of Langmuir probe and laser Thomson scattering for plasma density and electron temperature measurements in HiPIMS plasma
Author:
Affiliation:
1. Department of Electrical Engineering and Electronics, University of Liverpool, Brownlow Hill, Liverpool L69 3GJ, United Kingdom
Funder
Engineering and Physical Sciences Research Council
Publisher
AIP Publishing
Subject
Condensed Matter Physics
Link
http://aip.scitation.org/doi/pdf/10.1063/1.5094602
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