Author:
Coffa S.,Calleri G.,Calcagno L.,Campisano S. U.,Ferla G.
Subject
Physics and Astronomy (miscellaneous)
Cited by
12 articles.
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1. Analysis of conductivity degradation in gold/platinum-doped silicon;IEEE Transactions on Electron Devices;1996
2. Diffusion of platinum into dislocated and non-dislocated silicon;Semiconductor Science and Technology;1995-09-01
3. Diffusion and lifetime engineering in silicon;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1993-04
4. Diffusion and lifetime engineering in silicon;Ion Implantation Technology–92;1993
5. Characterization of point defect generation at silicon surfaces using gold diffusion;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1992-07