Polysilicon films of high photoresponse, obtained by vacuum annealing of aluminum capped hydrogenated amorphous silicon
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.360769
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2. Photoelectric Properties of SiGe Films Covered with Amorphous- and Polycrystalline-Silicon Layers;Ukrainian Journal of Physics;2019-06-18
3. In situX-ray diffraction studies of aluminium-induced crystallization of hydrogenated amorphous silicon;Journal of Applied Crystallography;2003-09-08
4. Polycrystalline silicon thin films on glass by aluminum-induced crystallization;IEEE Transactions on Electron Devices;1999
5. Aluminum mediated low temperature growth of crystalline silicon by plasma-enhanced chemical vapor and sputter deposition;Applied Physics Letters;1998-03-23
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