Crystal structure of Si1−xCxfilms by plasma‐enhanced chemical vapor deposition at 700 °C
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.347490
Reference11 articles.
1. IVA-8 heteroepitaxial growth of cubic silicon carbide on foreign substrates
2. Production of large‐area single‐crystal wafers of cubic SiC for semiconductor devices
3. Formation of Polycrystalline SiC in ECR Plasma
4. ESR and electrical properties of P-doped microcrystalline Si
5. Determination of Crystallite Size with the X‐Ray Spectrometer
Cited by 28 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. High rate fabrication of room temperature red photoluminescent SiC nanocrystals;Journal of Materials Chemistry C;2015
2. SiC nanocrystals: high-rate deposition and nano-scale control by thermal plasma;RSC Adv.;2014
3. Growth of thin SiC films on Si single crystal wafers with a microwave excited plasma of methane gas;Thin Solid Films;2013-06
4. Structural Evolution of SiC Films During Plasma-Assisted Chemical Vapour Deposition;Plasma Science and Technology;2009-04
5. Growth and Characterization of SiC Films by Hot-Wire Chemical Vapor Deposition at Low Substrate Temperature Using SiF4/CH4/H2Mixture;Japanese Journal of Applied Physics;2008-01-22
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3