Author:
Strokan N. B.,Ivanov A. M.,Savkina N. S.,Strelchuk A. M.,Lebedev A. A.,Syväjärvi M.,Yakimova R.
Subject
General Physics and Astronomy
Cited by
9 articles.
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1. SiC MEMS devices;Silicon Carbide Microsystems for Harsh Environments;2011
2. Silicon carbide and its use as a radiation detector material;Measurement Science and Technology;2008-08-11
3. Microscale sensors based on silicon carbide and silicon;Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science;2008-01-01
4. The Limit of SiC Detector Energy Resolution in Ion Spectometry;Materials Science Forum;2006-10
5. DESIGN, PERFORMANCE AND APPLICATIONS OF SIC MEMS;Silicon Carbide Microelectromechanical Systems for Harsh Environments;2006-06