1. State Key Laboratory of Dynamic Measurement Technology, School of Instrument and Electronics, North University of China 1 , Taiyuan 030051, China
2. Key Laboratory of Advanced Transducers and Intelligent Control Systems (Ministry of Education and Shanxi Province), College of Physics and Optoelectronics, Taiyuan University of Technology 2 , Taiyuan 030024, China
3. College of Mechatronics Engineering, North University of China 3 , Taiyuan 030051, China
4. Shanxi Province Key Laboratory of Quantum Sensing and Precision Measurement 4 , North University of China, Taiyuan 030051, China