A supersonic molecular beam study of the reaction of tetrakis(dimethylamido)titanium with self-assembled alkyltrichlorosilane monolayers
Author:
Publisher
AIP Publishing
Subject
Physical and Theoretical Chemistry,General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2220562
Reference85 articles.
1. Fabrication of Cu interconnects of 50 nm linewidth by electron-beam lithography and high-density plasma etching
2. Characteristics of ultrathin Ta and TaN films
3. Improved nucleation of TiN atomic layer deposition films on SiLK low-k polymer dielectric using an Al[sub 2]O[sub 3] atomic layer deposition adhesion layer
4. Conjugated Polymer Surfaces and Interfaces
Cited by 12 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Use of molecular beams for kinetic measurements of chemical reactions on solid surfaces;Surface Science Reports;2017-05
2. Initial Stages of Atomic Layer Deposition of Tantalum Nitride on SiO2 and Porous Low-κ Substrates Modified by a Branched Interfacial Organic Layer: Chemisorption and the Transition to Steady-State Growth;The Journal of Physical Chemistry C;2012-10-04
3. Initial Reaction Probability and Dynamics of Ozone Collisions with a Vinyl-Terminated Self-Assembled Monolayer;The Journal of Physical Chemistry C;2011-11-28
4. Optical cell for in situ vibrational spectroscopic measurements at high pressures and shear;Review of Scientific Instruments;2011-07
5. Hyperthermal organic thin film growth on surfaces terminated with self-assembled monolayers. I. The dynamics of trapping;The Journal of Chemical Physics;2011-06-14
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3