CO2laser annealing of silicon
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.331446
Reference13 articles.
1. Annealing of phosphorus‐ion‐implanted silicon using a CO2laser
2. CW CO2-laser annealing of arsenic implanted silicon
3. Annealing of boron-implanted silicon using a CW CO2 Laser
4. Spatially controlled crystal regrowth of ion‐implanted silicon by laser irradiation
5. CO2-LASER ANNEALING OF BURIED LAYERS PRODUCED BY MEV ION IMPLANTATION
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