In-line metrology for roll-to-roll UV assisted nanoimprint lithography using diffractometry
Author:
Affiliation:
1. Catalan Institute of Nanoscience and Nanotechnology (ICN2), CSIC and BIST, Campus UAB, Bellaterra, 08193 Barcelona, Spain
2. Institució Catalana de Recerca i Estudis Avancats (ICREA), 08010 Barcelona, Spain
Funder
Deutsche Forschungsgemeinschaft
Ministerio de Economía y Competitividad
H2020 European Research Council
FP7 Ideas: European Research Council
Publisher
AIP Publishing
Subject
General Engineering,General Materials Science
Link
http://aip.scitation.org/doi/pdf/10.1063/1.5011740
Reference26 articles.
1. Computer Image Processing of Transmission Electron Micrograph Pictures as a Fast and Reliable Tool To Analyze the Size of Nanoparticles
2. Recent advances in submolecular resolution with scanning probe microscopy
3. Advances in Scanning Force Microscopy for Dimensional Metrology
4. Nanoimprint Lithography: Methods and Material Requirements
5. The European nanometrology landscape
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1. Curvature-Adjustable Polymeric Nanolens Fabrication Using UV-Controlled Nanoimprint Lithography;Micromachines;2022-12-09
2. Chemical Biology of Double Helical and Non-Double Helical Nucleic Acids: “To B or Not To B, That Is the Question”;Bulletin of the Chemical Society of Japan;2021-07-15
3. In-line characterization of nanostructures produced by roll-to-roll nanoimprinting;Optics Express;2021-01-25
4. Scatterometry and diffractometry techniques to monitor surfaces textured by rapid ultra-short pulse laser;Journal of Physics: Photonics;2020-06-26
5. Real-time Optical Dimensional Metrology via Diffractometry for Nanofabrication;Scientific Reports;2020-03-25
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