Diffusion limited oxygen precipitation in silicon: Precipitate growth kinetics and phase formation
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.359832
Reference13 articles.
1. Electron Energy Loss Microspectroscopy: Small Particles in Silicon
2. Oxygen diffusion and thermal donor formation in silicon
3. Theory of diffusion-limited precipitation
4. Oxygen precipitation and microdefects in Czochralski-grown silicon crystals
5. An infrared and neutron scattering analysis of the precipitation of oxygen in dislocation-free silicon
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