Argon‐oxygen interaction in rf sputtering glow discharges
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.328610
Reference11 articles.
1. The effect of O2 on reactively sputtered zinc oxide
2. The effect of rf power on reactively sputtered zinc oxide
3. A System for Determining the Mass and Energy of Particles Incident on a Substrate in a Planar Diode Sputtering System
4. Glow‐discharge mass spectrometry—Technique for determining elemental composition profiles in solids
5. A mass spectrometric study of neutral−sputtered species in an rf glow discharge sputtering system
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