Nanoindentation of high-aspect ratio pillar structures on optical multilayer dielectric diffraction gratings-Reference-Cited by-同舟云学术

Nanoindentation of high-aspect ratio pillar structures on optical multilayer dielectric diffraction gratings

Published:2011-12 Issue:4 Volume:1 Page:042179
ISSN:2158-3226
Container-title:AIP Advances
language:en
Short-container-title:AIP Advances

Author:

Mehrotra K.¹²,Howard H. P.³²,Jacobs S. D.³²,Lambropoulos J. C.¹³²

Affiliation:

1. Department of Mechanical Engineering, University of Rochester, Rochester, New York 14627, USA

2. Laboratory for Laser Energetics, University of Rochester, Rochester, New York 14627, USA

3. Materials Science Program, University of Rochester, Rochester, New York 14627, USA

Funder

U.S. Department of Energy

Publisher

AIP Publishing

Subject

General Physics and Astronomy

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4. D. J. Smith, M. McCullough, B. Xu, S. Smith, M. L. Schattenburg, T. Jitsuno, and T. Mikami, “Large area pulse compression gratings fabricated onto fused silica using scanning beam interference lithography, ICUIL (2008).

5. B. Ashe, C. Giacofei, G. Myhre, and A. W. Schmid, “Optimizing a cleaning process for multilayer-dielectric (MLD) diffraction gratings,” LLE Review 112, 228 (2007).

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